半导体 1

Semiconductor Quartz Tube

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High-purity fused silica tubing for general-purpose applications. Available in a wide range of diameters and lengths. Excellent thermal stability, chemical resistance, and optical clarity.

I. Technical Specifications

Material : Fused Quartz (SiO2)
Purity : ≥99.99%
OH Content : <20 ppm
Density : 2.2 g/cm³
Coefficient of Thermal Expansion : 5.5 x 10^^-7 /°C
Softening Point : 1660 °C
Continuous Working Temperature : 1250 °C
Short-term Working Temperature : 1400 °C

I. Technical Specifications

7.石英球碗

Semiconductor-Grade Quartz Glass Tubes

Applications

Widely used in semiconductor silicon wafer processing, including oxidation, diffusion, and other processes.

Product Features

These tubes are characterized by high purity, low hydroxyl content, and high-temperature resistance.

Product Specifications

OD Range	OD Tolerance	WT Tolerance	Siding	Ovality	Bow
OD < 100	±1.00	±10.00%	15.00%	1.00%	0.10%
100≤OD < 200	±1.00	±10.00%	15.00%	1.00%	0.10%
200≤OD < 300	±1.00	±10.00%	15.00%	1.00%	0.10%
300≤OD < 400	±1.00	±10.00%	15.00%	1.00%	0.10%
400≤OD < 500	±1.00	±10.00%	15.00%	1.00%	0.10%
500≤OD < 600	±2.00	±10.00%	15.00%	1.00%	0.10%

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