High Purity Semiconductor Quartz Components

Aoxin Quartz is a trusted manufacturer of ultra-high purity quartz components critical for semiconductor fabrication processes. We specialize in producing precision-engineered quartzware, including furnace tubes, boats, injectors, rings, tanks, windows, and custom parts. Utilizing select grades of fused quartz and fused silica, our components meet the demanding requirements of modern semiconductor manufacturing, offering exceptional purity, thermal stability, plasma resistance, and tight dimensional tolerances. Partner with us for reliable, high-performance quartz solutions that enhance yield and process control.

Pair of clear quartz wafer cleaning baskets with long handles and perforated bottoms

High Thermal Stability

Low coefficient of thermal expansion provides excellent resistance to thermal shock. Usable at high temperatures (up to ~1100°C continuous)

High Purity

Minimal contaminants ensure process integrity, especially crucial for semiconductor applications.

Excellent Chemical Resistance

Inert to most acids and chemicals, ensuring long service life.

Superior Optical Properties

High transmission in UV, Visible, and IR spectrum (especially for clear fused silica).

Our Quartz Glass Products

We manufacture a wide range of quartz glass products available in various grades and dimensions, or fully customized to your specifications.

Key Features & Benefits

Material Grades: Fused Quartz (Specify purity levels, e.g., 99.99%), Fused Silica (Synthetic), Opaque/Translucent Quartz.
Outer Diameter (OD): Standard ranges (e.g., 2mm – 300mm) and custom sizes available upon request.
Wall Thickness (WT) / Inner Diameter (ID): Wide range of standard wall thicknesses, precise custom WT/ID achievable.
Length: Standard lengths (e.g., 1000mm, 1200mm) and custom cut-to-length services.
End Finishes: Standard cut, Fire-polished, Ground, Flanged, Domed ends.
Tolerances: Standard and high-precision tolerances available (Specify typical tolerance ranges).

Technical Specifications (Typical Values)

PropertyValue (Typical for Clear Fused Quartz)
Density2.2 g/cm³
Purity (SiO2 content)> 99.99%
Softening PointApprox. 1680 °C
Annealing PointApprox. 1180 °C
Coefficient of Thermal Expansion (20-300°C)5.5 x 10⁻⁷ /°C
Transmission (UV – Visible – IR)Excellent (Specific curve available

Note: These are typical values and may vary based on specific grade and manufacturing process.

Semiconductor Process Applications

Our quartz components are integral to numerous semiconductor fabrication steps

Semiconductor Processing (Furnace tubes, process chamber liners)

Industrial Heating Elements (Protection tubes)

Lighting (UV lamp envelopes, halogen lamps)

Fiber Optic Manufacturing (Preform handling)

Solar/Photovoltaic Industry

Chemical Processing

Laboratory Apparatus

Water Treatment (UV sterilization lamp sleeves)

AoXIN QUARTZ

Custom Fabrication & Engineering Support

Aoxin Quartz excels in custom manufacturing complex semiconductor quartz components. We have extensive experience working from customer drawings (OEM/ODM) and specifications. Our capabilities include:

· Multi-axis CNC machining for complex shapes.
· Precision grinding and polishing.
· Advanced quartz joining and sealing techniques (where applicable).
· Tight tolerance manufacturing.
· Engineering support for design optimization (DFM – Design for Manufacturing).

Related Services

We also offer value-added services for semiconductor quartzware: High-Purity Cleaning & Packaging, Quartz Component Repair & Refurbishment , Annealing & Thermal Treatment.

Frequently Asked Questions

Find answers to commonly asked questions about our products and services.

Contact Us

Address

No.39 Shixian West Road, Huifeng Township, Donghai County,Lianyungang,Jiangsu, China

Send Us a Message

Here\’s how you can contact us for any questions or concerns.

+8618961320658
08.00am – 06.00pm
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