1200°C High Temp Resistant
High Transmittance
Acid/Alkali Resistant
Complete Specifications
Aoxin Quartz manufactures precision-engineered High Purity Slotted Quartz Boats complete with custom-fit Carrier Trays (or Boxes). This two-part system is meticulously designed for the efficient handling, processing, and transport of multiple flat substrates, such as semiconductor wafers, optical components, or microscope slides. The slotted boat, crafted from high-purity fused quartz, features precisely spaced slots to ensure individual component separation and uniform exposure during processes like thermal annealing, chemical etching, or cleaning. The accompanying quartz carrier tray provides stable support and facilitates safe movement of the boat, minimizing handling risks. Ideal for applications demanding ultra-clean, high-temperature, and chemically inert environments.
- Product Name : High Purity Slotted Quartz Boat with Carrier Tray/Box
- Material : 99.99 % Purity Quartz
- Work Temperature ：~1200℃
- Soften point : ~1730℃
- Hardness : 5.5 – 6.5 Mohs’ Scale 570 KHN 100
- Tensile Strength : 4.8×107 Pa (N/mm2) (7000 psi)
- Compression Strength : >1.1×109 Pa (160,000 psi)
Features
- Optimized Batch Processing: The slotted boat allows for simultaneous processing of multiple substrates, enhancing throughput and efficiency while maintaining individual item integrity.
- Superior Material Purity: Fabricated from high-purity fused quartz to prevent contamination and ensure the utmost cleanliness required in critical processes like semiconductor manufacturing.
- Precision Slotting & Design: Uniformly spaced and sized slots provide secure holding and consistent positioning of substrates for uniform process exposure. The carrier tray is designed for a stable and secure fit.
- Excellent Thermal & Chemical Resistance: Withstands extreme temperatures and aggressive chemical environments, making it suitable for a wide range of thermal treatments and wet processing applications.
- Enhanced Handling & Safety: The carrier tray/box facilitates easier and safer transportation of the loaded quartz boat, reducing the risk of damage to delicate substrates.
- Durability & Reusability: Robust quartz construction ensures a long service life, even with repeated thermal cycling and chemical exposure.
- Customizable Solutions: Both the slotted boat (slot dimensions, number of slots, overall size) and the carrier tray can be fully customized to meet specific substrate sizes and processing equipment requirements.”