1200°C High Temp Resistant
High Transmittance
Acid/Alkali Resistant
Complete Specifications
- Product Name : Quartz Wafer Boat
- Material : 99.99 % Purity Quartz
- Work Temperature ：~1200℃
- Strain Point : ~1120℃
- Soften point : ~1730℃
| size | |||
|---|---|---|---|
| 1″ | OTF-1200X-S50 tube furnace (2″ tube furnace) |  1″ wafer with a quartz boat |  Mechanical Drawing |
| 2″ | OTF1200-3 tube furnace (3″ tube furnace) | 2″ wafer with a quartz boat |  2″ Quartz boat cross-section drawing (mm) – Length 180 mm |
| 3″ | OTF1200-4 tube furnace | 3″ wafer with a quartz boat |  3″ Quartz boat cross-section drawing (mm) – length 180 mm |
| 4″ | OTF1200X5L tube furnace | 4″ wafer with a quartz boat | 4″ Quartz boat cross-section drawing (mm) – length 180 mm |
| 4″ x 4″ | OTF-1200X-5L, VBF-1200X-H8, OTF-1100X-8.5 tube furnaces |  4″x4″ square wafer with a quartz boat | |
| 6″ | GSL1100X-8.5-S-UL tube furnace, GSL1100X-8.5-III tube furnace, Compact Vacuum Chamber Furnace EQ-VBF-1200X |  The dimension of 6″ quartz boat |  6″ wafer with quartz boat can be placed into 7″ tube |
| 8″ | GSL1100X-11-III tube furnace |  The dimension of 8″ quartz boat |  8″ wafer with quartz boat can be placed into 8.5″ tube |
| 12″ | OTF-1100X-III |  The dimension of 12″ quartz boat |  12″ wafer with quartz boat |
- Quartz wafer boats, crafted from 99.99% pure silica, offer exceptional dimensional accuracy and are designed for diffusion, oxidation, and annealing of quartz wafers at temperatures up to 1200°C without deformation or cracking.
- Each quartz boat can accommodate up to 25 wafers, with wafer sizes ranging from 1 inch to 12 inches and a thickness of 0.5 mm. The wafers can be either square or round, and we can provide tailored design solutions for your wafers based on the dimensions you require.
- We can design and produce quartz boats to match the specifications of equipment for manufacturers, and also offer replacement parts for university laboratories.